ASSEMBLY FOR CONTROLLING PRESSURE AND PLASMA PROCESSING APPARATUS THEREWITH

摘要

PURPOSE: A pressure control assembly and a plasma processing device including the same are provided to improve density of plasma by including a driving unit which lifts a pressure control ring. CONSTITUTION: A pressure control assembly comprises a pressure control ring and a driving unit(350). The pressure control ring surrounds the plasma process region inside a chamber(100). The center of the pressure control ring is vertically penetrated and the vertically extended height is larger than the width. The driving unit lifts the pressure control ring.