SEMICONDUCTOR MEMORY DEVICE AND PRODUCTION PROCESS OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor memory device and a method for manufacturing it, which improve integration degree and reliability of the semiconductor memory device by using a transistor mounted in a peripheral circuit region as a power decoupling capacitor for preventing abrupt fluctuation of supply voltage. SOLUTION: The semiconductor memory device formed on a substrate which is divided into a core region and the peripheral circuit region includes a capacitor structure extended from the core region to the peripheral circuit region. Each portion of the capacitor structure functions as a memory cell capacitor in the core region; and functions as a first capacitor and a second capacitor in the peripheral circuit region. The combination of the first capacitor and the second capacitor functions as a first power decoupling capacitor. The transistor disposed in the peripheral circuit region functions as a second power decoupling capacitor. COPYRIGHT: (C)2010,JPO&INPIT