| 摘要 |
PROBLEM TO BE SOLVED: To provide a pod for suppressing diffusion of microfine dust etc., accompanying a cover of the pod into a minienvironment and an FIMS system corresponding to the pod. SOLUTION: An engaged portion is arranged inside an outer side surface of the cover of the pod, and an insertion hole for allowing access to the engagement portion from an external space is arranged at a flange portion that the cover arranged at a pod opening periphery can engage. A latch mechanism is supported on a surface of the flange portion on the side of a pod body slidably in a direction parallel to a flange side wall, and an engagement portion of the latch mechanism reaches the engaged portion through the insertion hole to make state change between engagement and disengagement according to movement of the latch mechanism. COPYRIGHT: (C)2010,JPO&INPIT |
