| 摘要 |
PROBLEM TO BE SOLVED: To detect a deviation amount of a transfer position in a conveying system for transferring, between ports, an object to be conveyed which stores for example various substrates for semiconductor device production. SOLUTION: The conveying system (100) includes: a conveying body (20) capable of transferring an object to be conveyed (9) between ports where the object (9) is placed in a predetermined position, and holding the object; a travelling section (19) where the conveying body is mounted, and which can travel along a track located on a ceiling and can stop; a distance image means (10) which is held by the conveying body in place of the object to be conveyed so as to face the predetermined position when the travelling section stops in a stop position corresponding to the port and which images the port and outputs a distance image related to the port; and a deviation amount detecting means (25) which detects, based on the output distance image, a deviation amount of a transfer position of the conveying body with respect to the predetermined position when the travelling section stops in the stop position. COPYRIGHT: (C)2010,JPO&INPIT
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