| 摘要 |
<P>PROBLEM TO BE SOLVED: To lightwave-interference measure the shape of an inspected surface comprising a concave surface and a convex surface. Ž<P>SOLUTION: The position of the inspected surface 80 in the measurement light axis L direction relative to an interference optical system 2 is changed by using a sample stage 6, so that measurement light once converges and then is divergingly applied to the concave surface 81 in the case where the concave surface 81 of the inspected surface 80 is measured while the measurement light is convergingly applied to the convex surface 82 in the case where the convex surface 82 is measured. Further, a transmission liquid crystal display element 70 for projecting a prescribed shading pattern onto the inspected surface 80 is disposed on an optical path between a light source 20 and a branching optical element 3 in order to prevent unnecessary light from being reflected from a partial area of the inspected surface 80 and entering an imaging system 4 when the measurement light is applied to the inspected surface 80. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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