METHOD OF FABRICATING DEVICE

摘要

A method of fabricating a device is described. A substrate having at least two isolation structures is provided. A first oxide layer and a first conductive layer are sequentially formed on the substrate between the isolation structures. A first nitridation process is performed to form a first nitride layer on the surface of the first conductive layer and a first oxynitride layer on the surface of the isolation structures. A second oxide layer is formed on the first nitride layer and first oxynitride layer. A densification process is performed to oxidize the first oxynitride layer on the surface of the isolation structures. A second nitride layer and a third oxide layer are sequentially formed on the second oxide layer. A second nitridation process is performed to form a third nitride layer on the surface of the third oxide layer. A second conductive layer is formed on the third nitride layer.