发明名称 |
METHOD OF AND APPARATUS FOR MEASURING ELECTRIC FIELD VECTOR AND MICROSCOPE USING SAME |
摘要 |
A system for measuring an electric field vector includes an optical extractor configured to extract an optical signal having a spatial resolution of a nanometer level. The optical signal corresponds to incident light at a measuring position within an examination area of a surface of a specimen. The system further includes a polarization analyzer for analyzing a polarization characteristic of the optical signal extracted by the optical extractor, and an electric field vector determinator for determining at least a size and an orientation axis of an electric vector at the measuring position using the polarization characteristic analyzed by the polarization analyzer.
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申请公布号 |
US2010091294(A1) |
申请公布日期 |
2010.04.15 |
申请号 |
US20070519723 |
申请日期 |
2007.03.23 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;SEOUL NATIONAL UNIVERSITY R & DB FOUNDATION |
发明人 |
KIM DAI SIK;LEE KWANG GEOL;KIHM HYUN WOO |
分类号 |
G01J4/00;G01B9/02 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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