发明名称 SUPPORT STRUCTURE FOR OPTICAL ELEMENT, ALIGNER USING THE SAME, AND METHOD OF MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a support structure for an optical element that reduces deformation of the optical element due to variation in ambient temperature or an influence of a processing error or assembling error of a constituent member. <P>SOLUTION: The support structure for the optical element includes a first support member 2 which supports an optical element 1, a second support member 3 which supports the first support member 2 on an internal-diameter side, and an elastic member 4 which is disposed between the first support member 2 and second support member 3 in a diameter direction and has its inner-diameter side coupled with the first support member 2 and can elastically deform in the diameter direction, and the second support member 3 is in point contact with an outer-diameter side surface portion of the elastic member 4 in the diameter direction at a plurality of places. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010087048(A) 申请公布日期 2010.04.15
申请号 JP20080251821 申请日期 2008.09.29
申请人 CANON INC 发明人 YOSHIDA SETSUO
分类号 H01L21/027;G02B7/02;G03F7/20 主分类号 H01L21/027
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