发明名称 FLUSHING RECEPTIVE DEVICE AND DROPLET DISCHARGE DEVICE PROVIDED WITH THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a flushing receptive device capable of reducing the transport weight without causing any trouble to the movement, and a droplet discharge device provided with the same. <P>SOLUTION: The flushing receptive device comprises: a flushing receptive part provided with a sheet supporting plate having a plurality of negative pressure communication holes and horizontally supporting a liquid receiving sheet 63 for receiving a sacrifice discharge from a functional droplet discharge head from the upper side; and a moving part provided with a plurality of Bernoulli chucks provided to face upward to be distributed on the upper surface of a moving axis base and a moving means for moving the sheet supporting plate floated by a working gas supplied to the plurality of the Bernoulli chucks from a working gas supply means in a horizontal plane. The sheet support plate is arranged in the upper side of the plurality of the Bernoulli chucks with a certain floating space. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010082489(A) 申请公布日期 2010.04.15
申请号 JP20080250882 申请日期 2008.09.29
申请人 SEIKO EPSON CORP 发明人 FUJIMORI EIJIRO
分类号 B05C11/10;B05C5/00;G02F1/1335 主分类号 B05C11/10
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