| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology which highly precisely forms cutting lines and simply and securely monitors the creation situation of vertical cracks to stabilize the vertical cracks for the purpose of the stabilization of the vertical cracks and the control capable of preventing the generation of horizontal cracks in a method for dividing a panel to take out the panel into single items. <P>SOLUTION: Light is irradiated on a base plate on which the cutting lines are formed from the side surface thereof; the light reflected from vertical crack surfaces is received by a camera; and correction is made so as to properly create the vertical cracks based on the light receiving state to stabilize the vertical cracks. In a pushing method of providing a thrust force by a coil magnetic force to a control mechanism of pushing to create the vertical cracks, a measuring section to measure a pushing pressure is installed and a high-precise pushing control mechanism is provided which lessens the variation width of dynamic pushing by a mechanism feedforwarding to a controller to control the thrust force based on a measurement value by the measuring section. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
