发明名称 ADHESIVE TAPE AFFIXING DEVICE TO SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide an adhesive tape affixing device, which controls tension acting in the width direction of an adhesive tape, and affixes the adhesive tape to a substrate with a predetermined tension, when affixing a wide width adhesive tape to the substrate. SOLUTION: The adhesive tape affixing device 1 includes a tape chuck mechanism 16 including: a pair of right-left tape holding members 69 including an upper side chuck 17 and a lower side chuck 25 and capable of approaching and leaving mutually along the width direction of the adhesive tape 6; an elastic member 18 for urging the tape holding members 69 inward in the width direction of the adhesive tape 6; and a motor 20 which drives the right-left tape holding members 69 in a manner capable of approaching and leaving mutually, and detects the tension acting in the width direction as a torque value, when holding the adhesive tape 6. The adhesive tape 6 is held by a tape holding member 16 urged at the inside end in the width direction. The tape holding members 69 are separately reacted by the motor 20 so as to become a predetermined torque value. The tension acting in the width direction of the adhesive tape 6 is controlled to become a predetermined tension. Then, the adhesive tape 6 is affixed to the substrate 3. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010087265(A) 申请公布日期 2010.04.15
申请号 JP20080255041 申请日期 2008.09.30
申请人 TAKATORI CORP 发明人 TANIGAWA SHIGEKI;NISHITANI TAKAYUKI;KURIHARA HIROHITO
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址