| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly productive method of applying microparticles, capable of accurately arraying spacers on a substrate at prescribed positions in a liquid crystal display, and in addition, of uniformizing the number of the spacers contained in each of the spacer sections formed thereon. SOLUTION: A substrate W is held by a stage 3 freely movable in one direction. A dispersion comprising a solvent and microparticles dispersed therein is supplied to a plurality of nozzles 7 attached to an applicator head 6 freely movable in the direction of the Y axis with the direction of the X axis being the moving direction of the stage 3, and is dripped onto the substrate W at prescribed positions from each of the plurality of nozzles 7 to coat the same while causing the applicator head 6 and the substrate W to move relative to each other. The dispersion is dripped from the nozzles 7 plurality of times onto the substrate on one and the same prescribed position, and the solvent in the dispersion is dried every time after the dispersion is applied once thereonto. COPYRIGHT: (C)2010,JPO&INPIT
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