| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece moving table or the like, which allows miniaturization of a device and improvement in responsiveness to the acceleration and deceleration in the transportation by keeping the plane accuracy of a workpiece and reducing the transport weight. SOLUTION: The workpiece moving table has: a plurality of Bernoulli chucks which are provided to face upward to be distributed on the upper surface of a table base 22 and float the plate like workpiece W with a gas; a working gas supply means for supplying the working gas to the plurality of the Bernoulli chucks; and an X-axial moving mechanism 25 for moving the workpiece W floated with the gas by the plurality of the Bernoulli chucks by a pair of sliders mounted to freely slide on a pair of guide rails arranged in both sides along the X-axial direction of a table base 22. COPYRIGHT: (C)2010,JPO&INPIT
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