| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a color filter which improves rectangularity of each color pixel of the color filter and prevents the occurrence of residuals when forming red pixels. SOLUTION: Striped-shaped red patterns 27R are formed on a support member 11 by using a dry etching method. Stripe-shaped blue patterns 27B are formed on the support member 11 by using a photolithography method so as to fill gaps between red patterns 27B. Respective color patterns 27R and 27B are dry-etched to form blue pixels 20B, red pixels 20R, and green pixel formation regions 39. Green pixels 20G are formed on the green pixel formation regions 39 by using a photolithography method. Rectangularity of each color pixel is improved because of the reduction of steps of forming isolated patterns. Red pixels 20R (red patterns 27R) are formed as the first color without using a photolithography method, thereby the occurrence of residuals is prevented when forming red pixels. COPYRIGHT: (C)2010,JPO&INPIT
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