| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact, light, and precise optical position angle detector that irradiates the surface with spot light, detects the height of the surface by triangulation principles by forming an image of the reflection light on a PSD by a lens, measures the sectional shape of the surface by scanning the surface by spot light, and is not influenced by lens aberrations. Ž<P>SOLUTION: The optical position angle detector includes: a light projection means for condensing light emitted from a light source 1 onto a target surface for scanning; a front side spherical lens 16a and rear side spherical lenses 16b, 16c for forming images of reflection light from the surface by scanning light; a half mirror 21 for dividing the reflection light into two systems; two light position detection means 18a, 18b having mutually different light axis distances; and an operation section for measuring a surface shape by inversely tracing rays from a detection signal from the detection means and lens data of respective spherical lenses 16a, 16b, 16c and hence calculating the positions and angles of reflection points on the surface. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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