| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem wherein an irregular defect cannot be detected accurately, when a position relation of an inspection surface to a light irradiation means and an imaging means is changed with elapse of time, and an imaged image is changed successively, in detection of the irregular defect on an inspection object surface having mirror finish property. Ž<P>SOLUTION: A surface inspection device is equipped with the light irradiation means for irradiating the inspection object with light having a light/dark pattern, the imaging means for imaging the light/dark pattern reflected by the inspection object, and a data processing means for inspecting the inspection object surface based on an imaged image including the light/dark pattern imaged by the imaging means. The data processing means detects a boundary point between a light domain and a dark domain of the light/dark pattern from an image imaged by the imaging means, generates a master of a boundary line of the light/dark pattern from the boundary point, and compares the boundary line of the light/dark pattern in the imaged image with the boundary line of the master, and consequently, when a shape of the light/dark pattern in the imaged image is changed, the irregular defect can be detected highly accurately, and a size can be quantified. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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