| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the effects of fluid of which amount is increased through the connection of a temperature control device on change in a liquid level within a target device, in the temperature control device for controlling the temperature of the fluid by circulating the fluid from the target device internally filled with fluid and used to outside. Ž<P>SOLUTION: The temperature control device includes: a temperature control part 10; a first flow passage 21; a second flow passage 22; a bypass flow passage 20 for interconnecting the first and second flow passages 21, 22; a switching device 3 for switching a first circulation state in which fluid is not supplied to the target device 100 and a second circulation state in which the fluid is supplied to the target device 100; a volume control device 2 for retracting the fluid having volume increased due to a temperature rise from a circulation passage and returning the fluid having volume reduced due to temperature decline to the circulation passage in the first circulation state; and a separation device 4 for separating the volume control device 2 from the circulation passage in the second circulation state. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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