| 发明名称 |
MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION |
| 摘要 |
<p>A microelectromechanical (MEMS) device (1300) includes a substrate (20), a movable element (1340) over the substrate (20), and an actuation electrode (142) above the movable element (1340). The movable element (1340) includes a deformable layer (1302) and a reflective element (1314), The deformable layer (1302) is spaced from the reflective element (1314).</p> |
| 申请公布号 |
KR20100039383(A) |
申请公布日期 |
2010.04.15 |
| 申请号 |
KR20107002342 |
申请日期 |
2008.06.24 |
| 申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
CHUI CLARENCE;CUMMINGS WILLIAM;GALLY BRIAN J.;KOGUT LIOR;TUNG MING HAU;TUNG YEH JIUN;CHIANG CHIH WEI;ENDISCH DENIS |
| 分类号 |
G02B26/00;B81B7/00;B81C1/00;B81C99/00 |
主分类号 |
G02B26/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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