| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a perpendicular magnetic recording medium, with which a yield of the perpendicular magnetic recording medium is improved by efficiently removing deposition in a chamber used for a step of depositing a protective layer so as to reduce mixing of particles in layers on the substrate. SOLUTION: The method for manufacturing the perpendicular magnetic recording medium 100 includes: a magnetic recording layer-depositing step of depositing a magnetic recording layer 122 with a granular structure having a nonmagnetic grain formed between crystalline particles grown in columnar shapes, on the substrate 110; a protective layer-depositing step of depositing a carbon-based protective layer 126 with a CVD method; and a cleaning step of removing the deposition deposited in the chamber used for depositing the carbon-based protective layer by using ozone. COPYRIGHT: (C)2010,JPO&INPIT
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