发明名称 STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVICE PROVIDED WITH THE SAME
摘要 The present invention relates to a static pressure slider including a stationary member 2, and a movable member 3 configured to be movable relative to the stationary member 2 under a condition that a static pressure fluid layer is provided between the stationary member 2 and the movable member 3. The static pressure slider further includes a first conductive layer 25 (26-28), and a second conductive layer 31A (32A-34A) with a distance at least in a portion relative to the first conductive layer 25 (26-28) configured to be changeable by an electrostatic force imposed between the first and second conductive layers 25 (26-28) and 31A (32A-34A). The present invention further relates to a transferring device and a processing device both provided with the static pressure slider.
申请公布号 US2010092113(A1) 申请公布日期 2010.04.15
申请号 US20070294005 申请日期 2007.03.15
申请人 KYOCERA CORPORATION 发明人 MUNEISHI TAKESHI
分类号 F16C32/06;G01B7/14;G21K5/10;G21K7/00;H02N11/00 主分类号 F16C32/06
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