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发明名称
STEREOSKOPISCHES DREIDIMENSIONALES METROLOGIESYSTEM UND -VERFAHREN
摘要
申请公布号
AT464535(T)
申请公布日期
2010.04.15
申请号
AT20020806181T
申请日期
2002.12.18
申请人
RUDOLPH TECHNOLOGIES, INC.;MARINER ACQUISITION COMPANY LLC
发明人
SNOW, DONALD;STROM, JOHN;KRAFT, RAYMOND
分类号
G01B11/00;G01B11/14;G01B11/03;G01B11/245;G01B11/25;G01C11/06;H01L21/66;H05K13/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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