| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction device capable of automatically detecting an abrasion or a displacement arising on a suction pad. SOLUTION: The suction device 100 has a control part 40 having such a function for controlling that when a suction sensor 30 measures a suction force F1 at a reference position L<SB>0</SB>of the suction pad 10 and a deciding part 42 decides that the measured suction force F1 is smaller than a threshold value TH, a driving part 20 displaces the suction pad 10 by a prescribed displacement amount in an elevating or lowering direction or an intersecting direction, and when the suction sensor 30 measures a suction force F2 of the suction pad 10 at a displaced position (displaced position L<SB>D</SB>) and the deciding part 42 decides that the suction force F2 is larger than the threshold value TH, a displacement amountΔL is obtained. COPYRIGHT: (C)2010,JPO&INPIT |
