发明名称 |
PIEZOELCTRIC ACTUATOR, METHOD OF MANUFACTURING SAME, AND LIQUID EJECTION HEAD |
摘要 |
The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.
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申请公布号 |
US2010091073(A1) |
申请公布日期 |
2010.04.15 |
申请号 |
US20090637368 |
申请日期 |
2009.12.14 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
NIHEI YASUKAZU |
分类号 |
B41J2/045;H01L41/04;H01L41/22 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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