| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lead-containing perovskite-type oxide film having excellent piezoelectric characteristic and capable of setting both two coercive electric fields of the hysteresis characteristics in a piezoelectric body to be on the positive electric field side, and setting the film thickness to be >2 μm without generating any stress, a method of producing the same, and a piezoelectric device using the piezoelectric body consisting of the oxide film, and a liquid ejecting apparatus using the piezoelectric device. <P>SOLUTION: There is provided a lead-containing perovskite-type oxide film having principally (100) and/or (001) orientation and containing lead as a chief component, which is over 2 μm thick and exhibits such hysteresis characteristics that two coercive electric fields are both positive. Further, the quantity of lead indicating the molar ratio of lead to cations other than lead out of cations contained in the oxide film is ≥1.07, and substantially contains no impurity phase in the measurement of θ/2θ of the X-ray diffraction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
