METHOD FOR MANUFACTURING THREE-DIMENSIONAL PATTERNED BODY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a three-dimensional patterned body having a three-dimensional pattern region including a sharp edge portion and a smooth feature.

SOLUTION: The method includes: a step (d) of forming an etching stop pattern 2a on a substrate; a photoresist film forming step (e) of forming a photoresist film 3 to cover the etching stop pattern; a resist patterning step (e) of subjecting the photoresist film to grayscale exposure and development; an etching step (g) of etching the resist pattern and the substrate to form a three-dimensional pattern region; and a step (h) of removing the etching stop pattern. In the film thickness of the resist pattern at both side faces of the etching stop pattern in the member to be treated, the smaller film thickness is smaller than the maximum film thickness of the resist pattern.

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