| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machine capable of easily and quickly machining the surface of a workpiece. <P>SOLUTION: A workpiece is machined on the surface by irradiating it with a laser beam scanned by a galvano scanner through a telecentric type fθlens. The light is made incident along the optical axis of the laser beam from the upstream side of the galvano scanner and, by receiving the light reflected on the surface of the workpiece and returned along the optical axis of the laser beam, a distance to the surface is detected. Accordingly, between the upstream side of the galvano scanner and the surface of the workpiece, the optical axis of the laser beam and the optical axis for the distance detection coincide with each other, so that a distance to the irradiation position of the laser beam can be always accurately detected. Consequently, troublesome optical axis alignment is dispensed with and, in addition, by scanning the laser beam by the galvano scanner, quick machining is performed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
