发明名称 DEVELOPMENT PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide a development processor reducing the number of components, and having a high level of design margin in a limited space. SOLUTION: Three development processing units DEV are arranged side by side in a line at the same height in a common housing 50 with atmospheres thereof made to communicate with one another. A slit nozzle 610 and a porous nozzle 620 for supplying a developer are arranged for the three development processing units DEV in common. Among the development processing units DEV adjacent to one another, standby pods 70 each receiving the slit nozzle 610 and the porous nozzle 620 in a standby state are arranged. The standby pod 70 functions as a partition wall between the development processing units DEV adjacent to each other as well. Thereby, the need of newly arranging a separate partition plate is obviated, the number of components of the development processor can be reduced, and a high level of design margin can be provided in a limited space of the housing 50. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010087323(A) 申请公布日期 2010.04.15
申请号 JP20080255941 申请日期 2008.10.01
申请人 SOKUDO CO LTD 发明人 SUGIYAMA NEN;YOSHII HIROYUKI;SHIGA MASAYOSHI
分类号 H01L21/027;G03F7/30 主分类号 H01L21/027
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