| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a color filter which improves rectangularity of each color pixel of the color filter and prevents exfoliation of blue pixels. SOLUTION: Striped-shaped blue patterns 27B are formed on a support member 11 by using a dry etching method. Stripe-shaped red patterns 27R are formed on the support member 11 by using a photolithography method so as to fill gaps between blue patterns 27B. Respective color patterns 27B and 27R are dry-etched to form blue pixels 20B, red pixels 20R, and green pixel formation regions 39. Green pixels 20G are formed on the green pixel formation regions 39 by using a photolithography method. Rectangularity of each color pixel is improved because of the reduction of steps of forming isolated patterns. A blue layer 33B is formed as the first color and the blue layer 33B is dry-etched to form blue pixels 20B, thereby exfoliation of the blue pixels 20B is prevented. COPYRIGHT: (C)2010,JPO&INPIT
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