| 摘要 |
PROBLEM TO BE SOLVED: To provide a method, a device and electronic equipment for forming a pattern having a cross section shape with a narrow width and a uniform thickness. SOLUTION: The pattern forming method includes: a first stage that heats a substrate to a prescribed temperature; a second stage that, holding the substrate at the prescribed temperature, drips a liquid material with pattern forming materials dispersed or dissolved, on the substrate and dries it; a third stage that makes the evaporation speed slower than the evaporation speed when the liquid material is dripped on the substrate of the prescribed temperature; and a fourth stage that drips the liquid material on the dried body which is formed by drying the liquid material. COPYRIGHT: (C)2010,JPO&INPIT
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