| 摘要 |
PROBLEM TO BE SOLVED: To reduce an effect of radiant heat from the outside. SOLUTION: This cryopump 10 includes a second-stage cryopanel 14, a radiation shield 16 that surrounds the second-stage cryopanel 14 and includes a shield opening 31, and a first-stage cryopanel 32 provided in the shield opening 31. The first-stage cryopanel 32 includes a first panel 50 having opening regions thereon in a first distribution, and a second panel 52 arranged closer to the second-stage cryopanel 14 than the first panel 50 and having opening regions thereon in a second distribution different from the first distribution when viewed in an arrangement direction of the first and second panels. COPYRIGHT: (C)2010,JPO&INPIT |
