MECHANISM FOR CONVERGING CHARGED PARTICLE FLOW, METHOD FOR USING THE MECHANISM FOR CONVERGING CHARGED PARTICLE FLOW, AND VACUUM FILM-FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a mechanism for converging a charged particles flow, which can suitably and simply control the converged state of the charged particles flow that is used for evaporating a raw material. SOLUTION: The mechanism for converging the charged particles flow includes: an evaporation source 15 which accommodates the raw material 13 therein; a charged-particles-flow-discharging means 110 which discharges the charged particles flow that can heat and evaporate the raw material 13; a magnet 19 which is arranged so as to face to the evaporation source and generates a magnetic flux line for converging the charged particles flow; and a magnetic member transfer means 120 which can transfer a magnetic member 31 in a space between the evaporation source 15 and the magnet 19. COPYRIGHT: (C)2010,JPO&INPIT