发明名称 DEVICE FOR MANUFACTURING WIDE SURFACE BLANKET AND METHOD FOR MANUFACTURING THE BLANKET USING THE SAME
摘要 <p>PURPOSE: A device and a method for manufacturing a blanket with a large area are provided to manufacture the blank which is not contaminated by removing foreign materials inside the blanket. CONSTITUTION: A vacuum plate(20) receives a base material of a blanket as a bottom surface. A well(30) is formed by an outer wall by the vacuum plate and an outer circumference. A blade(40) is positioned in the inner space of the well and controls the thickness of the blanket. A height controller controls the height of the blade.</p>
申请公布号 KR20100038612(A) 申请公布日期 2010.04.15
申请号 KR20080097647 申请日期 2008.10.06
申请人 LG CHEM. LTD. 发明人 JEON, KYOUNG SU;LEE, SEUNG HEON
分类号 H01L21/027 主分类号 H01L21/027
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