| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for depositing film on a substrate having high reliability, and to provide a method of producing a piezoelectric vibrator. Ž<P>SOLUTION: The method of producing a piezoelectric vibrator comprises: a step where a piezoelectric substrate is held to a mask having openings obtained by dividing the region to be film-deposited of a piezoelectric substrate to prescribed ranges; a step where a thin film is deposited on the surface of the piezoelectric substrate through the openings by a vapor deposition process or a sputtering process; a step where a resist film is deposited on the thin film, and the resist film is patterned to the shape of a piezoelectric vibrator; a step where the exposed thin film is removed with the resist film patterned to the shape of the piezoelectric vibrator as a mask; and a step where the piezoelectric substrate is etched with the thin film as a mask. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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