| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide technology for appropriately performing various processing operations on temperature change processing of a thermal processing apparatus in accordance with a facility environment when the apparatus is used. Ž<P>SOLUTION: When a setting temperature of a thermal processing plate 11 is dropped, a control part 40 opens a cooling water bulb 67, supplies cooling water to a cooling plate 21 and cools the thermal processing plate 11. The control part 40 decides a timing for stopping cooling water supply to the cooling plate 21 based on a supply temperature of cooling water obtained from a cooling water temperature sensor 71. The stop timing of cooling water supply is specified by considering the temperature of cooling water. Thus, the optimum stop timing is precisely specified and the time required for heat reduction processing can be shortened. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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