| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a collet chuck having a hard surface layer formed at a lower cost and having high quality. Ž<P>SOLUTION: Titanium permeation films 22a-22c are formed at the holding surface 18 of the collet chuck 10, an outer circumferential surface of a tapered part 15, and an outer circumferential surface of a fitting part 16, respectively. The titanium permeation films 22a-22c are a film of a titanium compound formed on the base material of the collet chuck 10. In the film, the base material and the titanium compound are fused and titanium concentration is gradiently distributed in a film thickness direction. The film has high adhesiveness with the base material. Cobalt alloy is fused to the base material in stead of the titanium permeation films 22a-22c and a cobalt permeation film having a gradient distribution of cobalt concentration in the film thickness direction may be formed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
