PEDESTAL HEATER FOR LOW TEMPERATURE PECVD APPLICATION
摘要
A method and apparatus for providing power to a heated support pedestal is provided. In one embodiment, a process kit is described. The process kit includes a hollow shaft made of a conductive material coupled to a substrate support at one end and a base assembly at an opposing end, the base assembly adapted to couple to a power box disposed on a semiconductor processing tool. In one embodiment, the base assembly comprises at least one exposed electrical connector disposed in an insert made of a dielectric material, such as a plastic resin.
申请公布号
WO2010008827(A3)
申请公布日期
2010.04.15
申请号
WO2009US48253
申请日期
2009.06.23
申请人
APPLIED MATERIALS, INC.;ZHOU, JIANHUA;YAP, LIPYEOW;SKLYAR, DMITRY;AYOUB, MOHAMAD;JANAKIRAMAN, KARTHIK;ROCHA-ALVAREZ, JUAN, CARLOS
发明人
ZHOU, JIANHUA;YAP, LIPYEOW;SKLYAR, DMITRY;AYOUB, MOHAMAD;JANAKIRAMAN, KARTHIK;ROCHA-ALVAREZ, JUAN, CARLOS