| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an induction coupled plasma generator with thermal expansion of an insulator improved for insulating an electrode and the ground. <P>SOLUTION: The plasma generator includes a chamber housing a substrate, a susceptor supporting the substrate and with a power source applied, a support base supported by the chamber to support the susceptor, and an insulator arranged between the susceptor and the support body to insulate the susceptor and the support body. Moreover, the insulator is formed by being separated into two or more. <P>COPYRIGHT: (C)2010,JPO&INPIT |
