MICROWAVE GENERATING DEVICE AND METHOD OF CONTROLLING THE SAME, AND PLASMA PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce replacement of a magnetron and to use a microwave generating device for a longer time.

SOLUTION: The method of controlling the microwave generating device 45, using the magnetron 80, which supplies a filament voltage to a filament 81 of the magnetron 80 and supplies an anode voltage between the filament 81 and an anode 84 to oscillate a microwave includes the processes of: supplying a filament voltage having a base value and measuring an anode voltage and an anode current during oscillation of the microwave; comparing the relation between the anode voltage and anode current with reference characteristics; and raising the filament voltage above the base value when the relation between the anode voltage and anode current deviates from the reference characteristics.

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