摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which prevents the peeling of a piezoelectric vibration element and a conductive adhesive and has excellent hysteresis characteristics without the fluctuation of an oscillation frequency. SOLUTION: The piezoelectric device includes: a container body formed on one main surface of a substrate part by the substrate part and a frame part and provided with a first recessed space; a piezoelectric vibration element loaded on a pair of two piezoelectric vibration element-loading pads provided on one main surface of the substrate part exposed inside the first recessed space and provided with an electrode for excitation; and a lid body for airtightly sealing the first recessed space. A pad for a support bump pulled out from the piezoelectric vibration element loading pad is provided, and the support bump is provided on the main surface of the pad for the support bump. COPYRIGHT: (C)2010,JPO&INPIT
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