摘要 |
PROBLEM TO BE SOLVED: To provide a layered body which can contribute to performance improvements of various members. SOLUTION: By bringing a solution for forming a cobalt oxide film 3 containing a source of cobalt, a single crystal forming solvent capable of forming a single crystal of cobalt oxide 2 as a solvent and a solution for forming a cobalt oxide film 3 containing a diketone or a ketoester into contact with a substrate 1 heated to a temperature of cobalt oxide film forming temperature or higher, a cobalt oxide film is formed on the substrate. The film thickness of the formed cobalt oxide film is 500 nm or more. COPYRIGHT: (C)2010,JPO&INPIT
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