发明名称 CURABLE COMPOSITION FOR NANOIMPRINT, CURED MATERIAL, AND METHOD FOR PRODUCING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a curable composition for nanoimprint, excellent in all of light transmittance, composition viscosity, pattern accuracy, substrate adhesiveness, light resistance, and heat resistance. Ž<P>SOLUTION: The curable composition for nanoimprint contains (A) a polymerizable monomer, (B) a photoinitiator, and (C) an ultraviolet light absorber having a molar absorption coefficient of 50,000 or more at a wavelength of 365 nm in ethyl acetate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010083970(A) 申请公布日期 2010.04.15
申请号 JP20080253495 申请日期 2008.09.30
申请人 FUJIFILM CORP 发明人 FUJITA AKINORI
分类号 C08F2/44;C08F20/00;H01L21/027 主分类号 C08F2/44
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