| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lift pin that absorbs impact when the tip of a lift pin is brought into contact with a substrate while inhibiting a lift pin hole from having a larger diameter than required. Ž<P>SOLUTION: The lift pin (41) goes in and out of an insertion hole (33) provided in a stage (3) so as to place a substrate (K) on the surface (31) of the stage (3). The lift pin includes a pin upper-end part (41S) insertable into the insertion hole (33) of the stage (3) and brought into contact with the back surface of the substrate (K) so as to support the substrate (K) at a prescribed position, and a pin base part (41H) arranged on the back surface side of the stage (3) so as to be connected to the pin upper-end part (41S). The pin base part (41H) has a buffering mechanism (44) for buffering impact when the pin upper-end part (41S) is brought into contact with the substrate (K). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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