| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a zinc oxide-based sintered target which can stably form a thin film with low resistance, and to provide a method for producing the same. <P>SOLUTION: The zinc oxide-based sintered target contains 0.2 to 3 mass% aluminum, sintered density is ≥5.5 g/cm<SP>3</SP>, and also, ≥8 atomic% of the aluminum is present in a solid-soluted form. The target can be produced by regulating zinc oxide powder with the average grain size of ≤1 μm and the composite oxide powder of zinc and aluminum with the average grain size of ≤1.5 μm in such a manner that the aluminum is comprised by 0.2 to 3 mass% so as to be mixed, thereafter press-molding the mixture, and then performing sintering at 1,200 to 1,500°C in a nitrogen gas flow with an oxygen concentration of ≤1 ppm so as to obtain a sintered compact in which sintered density is ≥5.5 g/cm<SP>3</SP>, and ≥8 atomic% of the aluminum is present in a solid-soluted form. <P>COPYRIGHT: (C)2010,JPO&INPIT |
