| 摘要 |
PROBLEM TO BE SOLVED: To suppress an increase in the weight of a nozzle element even when a material to be treated is enlarged in the size and to ensure the uniformity of treatment. SOLUTION: A plurality of groove forming parts 13f, which are divided in a first direction, are set on the main surface of a groove forming member 11 of a nozzle element 3. Grooves 40 containing tree groove parts 41 and opening groove parts 42 are formed on the respective groove forming parts 13f. The opening groove parts 42 are opened on the end surface of the groove forming members 11. Adjacent opening groove parts 42 are communicated through communicating parts 49. COPYRIGHT: (C)2010,JPO&INPIT |
