| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a fine channel such as micro and nano channels with simplicity and excellent mass-productivity. SOLUTION: A fine channel such as micro and nano channels is formed by growing vertically a nano wire using plasma CVD or thermal CVD and metal nano fine particles arranged in a pattern on a substrate as growth nuclei after vapor-depositing the metal nano fine particles in a pattern for the growth nuclei of the nano wire on the substrate. A fine channel is formed by growing vertically a water-repellent nano wire at a catalyst pattern site formed on a hydrophilic substrate. The portion where the water-repellent nano wire has been grown comes to a side wall of the fine channel (groove portion) and the portion where the hydrophilic substrate has been exposed comes to a bottom portion of the fine channel (groove portion). Alternatively, a fine channel is formed by growing vertically a hydrophilic nano wire at a site of a catalyst pattern formed on a water-repellent substrate, and the portion where a hydrophilic nano wire has been grown comes to a channel space (groove itself) of the fine channel. COPYRIGHT: (C)2010,JPO&INPIT
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