SELECTIVE GAS-PERMEABLE FILM AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a selective gas-permeable film having polar molecular gas permeability and non-polar molecular gas barrier property. SOLUTION: The selective gas-permeable film is manufactured by elongating a gas barrier film formed of a vapor deposition film layer 20 having a thickness of 5 to 50 nm prepared by supplying an organic silicon compound, metal or metal oxide on a base film 10. The selective gas-permeable film has an improved oxygen permeability while keeping a water vapor permeability. COPYRIGHT: (C)2010,JPO&INPIT