发明名称 |
POSITIVE-WORKING PHOTOIMAGEABLE BOTTOM ANTIREFLECTIVE COATING |
摘要 |
The present invention relates to a novel absorbing, photoimageable and aqueous developable positive-working antireflective coating composition comprising a photoacid generator and a polymer comprising at least one unit with an acid labile group and at least one unit with an absorbing chromophore. The invention further relates to a process for using such a composition. The present invention also relates to a novel absorbing, photoimageable and aqueous alkali developable positive-working antireflective coating composition comprising a polymer comprising at least one unit with an acid labile group, a dye and a photoacid generator. The invention further relates to a process for using such a composition. The invention also relates to a novel process for forming a positive image with a positive photoresist and a novel photoimageable and aqueous developable positive-working antireflective coating composition, where the antireflective coating comprises a polymer comprising an acid labile group. The invention further relates to such a composition. The invention also relates to a process for imaging a photoimageable antireflective coating composition.
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申请公布号 |
KR20100039437(A) |
申请公布日期 |
2010.04.15 |
申请号 |
KR20107004715 |
申请日期 |
2003.01.03 |
申请人 |
AZ ELECTRONIC MATERIALS (JAPAN) K.K. |
发明人 |
OBERLANDER JOSEPH E.;DAMMEL RALPH R.;DING LEE SHUJI;NEISSER MARK O.;TOUKHY MEDHAT A. |
分类号 |
G03C1/76;G03F7/11;A61P29/00;G03F7/004;G03F7/039;G03F7/09 |
主分类号 |
G03C1/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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