METHOD FOR FABRICATING CAPACITOR

摘要

PURPOSE: A method for manufacturing a capacitor is provided to improve a leakage current property of a capacitor by reducing a carbon element inside a thin film. CONSTITUTION: A bottom electrode is formed on the upper side of the semiconductor substrate. A dielectric layer is stacked by depositing a chemical oxide(12), an aluminum oxide or hafnium oxide layer on the upper side of the bottom electrode. A top electrode(18) is formed on the upper side of the dielectric layer.