| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compound sensor which detects acceleration with high sensitivity, while inhibiting output fluctuations. <P>SOLUTION: Four mass parts 4, 8, 12 and 13 are connected by a support beam 14. The adjacent mass parts 4, 13, and the adjacent mass parts 8, 12 are vibrated with an opposite phase by a vibration generation parts 16, 19. Displacement detection parts 22, 25 for angular velocity detection can detect an angular velocity Ω around Z axis using the inner frame bodies 6, 10 of the mass parts 4, 8. Outside of the mass parts 12, 13, the mass parts 29, 32 are mounted. The displacement detection parts 40, 43 for the acceleration detection detect the acceleration α of Y axis direction using the mass parts 29, 32. The damping parts 34, 37 for the attenuation of the vibration of the mass parts 29, 32 are mounted between a base plate 2 and the mass parts 29, 32. A mechanical Q value of the mass parts 29, 32 is decreased thereby. <P>COPYRIGHT: (C)2010,JPO&INPIT |
