| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of effectively utilizing energy given to exhaust gas and a method of preventing recombination of gases generated by plasma decomposition treatment in plasma decomposition treatment of perfluoro-compound (PFC) gases. <P>SOLUTION: The method of treating exhaust gas containing PFC gases through a plasma treatment for decomposing PFC gases in exhaust gas is characterized by recovering energy by carrying out MHD power generation with the plasma generated in the plasma treatment. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
